HCC-3080S is a clean system for 4/6/8/12-inch wafer container, it adopts Hwatsing's innovative technology, equipped with superior performance water recovery device, its unique two-door design enables independent loading and removal of the cassettes before and after cleaning, with the advantages of high environmental protection and low consumption.
Compatible with 4/6/8/12-inch wafer container cleaning
Equipped with DIW reclaim system to reduce DIW consumption
Dual-door design to realize loading/unloading pre-and post-cleaning containers from different doors to minimize contamination risk