iPUMA-HT is a 12-inch hot ion implanter developed from a mature high current implanter by Hwatsing, under the requirements of advanced device technologies. The implanter is equipped with hot temperature module, temperature detection unit and cooling package to meet the demands of advanced process technologies. The equipment has been applied in semiconductor manufacture such as advanced logic device.
Domestically developed thermal implantation platform
Accurate process temperature control module
Good uniformity of process temperature
Meeting the technical requirement for the advanced process