iPUMA-HP is a 12-inch hydrogen high-current ion implanter developed from a mature high current implanter by Hwatsing. The implanter is equippped with good particle selectivity and cooling module to meet the requirement of particle number and temperature control in the process flow of layer transfer technology.It could increase the productivity by hardware upgrade. The equipment has been applied in wafer maker manufacture.
Domestically developed hydrogen high current implantation platform
Good process cooling module
Good uniformity of process
Meeting productivity requirement from user